Inventor
YI CHAMPION
TW10 patents
⚠️ This page may combine multiple inventors who share the name “YI CHAMPION”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PROMOS TECHNOLOGIES INC
8 patentsUS6153116ANov 28, 2000
Method of detecting end point and monitoring uniformity in chemical-mechanical polishing operation
PROMOS TECHNOLOGIES INC96 citations95
US6461226B1Oct 8, 2002
Chemical mechanical polishing of a metal layer using a composite polishing pad
PROMOS TECHNOLOGIES INC22 citations91
US6432728B1Aug 13, 2002
Method for integration optimization by chemical mechanical planarization end-pointing technique
PROMOS TECHNOLOGIES INC43 citations90
US6227949B1May 8, 2001
Two-slurry CMP polishing with different particle size abrasives
PROMOS TECHNOLOGIES INC30 citations90
US6130163AOct 10, 2000
Stabilization of slurry used in chemical mechanical polishing of semiconductor wafers by adjustment of PH of deionized water
PROMOS TECHNOLOGIES INC17 citations83
US6238279B1May 29, 2001
Magnetic filtration for slurry used in chemical mechanical polishing of semiconductor wafers
PROMOS TECHNOLOGIES INC15 citations79
US6053802AApr 25, 2000
Stabilization of slurry used in chemical mechanical polishing of semiconductor wafers by megasonic pulse
PROMOS TECHNOLOGIES INC8 citations71
US6780092B2Aug 24, 2004
Polishing tool used for CMP
PROMOS TECHNOLOGIES INC3 citations61