Inventor
BACKHAUSS HENNING
DE12 patents
⚠️ This page may combine multiple inventors who share the name “BACKHAUSS HENNING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VISTEC SEMICONDUCTOR SYS GMBH
8 patentsUS7248354B2Jul 24, 2007
Apparatus for inspection of a wafer
VISTEC SEMICONDUCTOR SYS GMBH21 citations92
US7327450B2Feb 5, 2008
Apparatus for inspection of a wafer
VISTEC SEMICONDUCTOR SYS GMBH12 citations83
US7224446B2May 29, 2007
Apparatus, method, and computer program for wafer inspection
VISTEC SEMICONDUCTOR SYS GMBH15 citations83
US7265823B2Sep 4, 2007
System for the detection of macrodefects
VISTEC SEMICONDUCTOR SYS GMBH14 citations80
US7460219B2Dec 2, 2008
Method for optically inspecting a wafer by sequentially illuminating with bright and dark field light beams wherein the images from the bright and dark field illuminated regions are spatially offset
VISTEC SEMICONDUCTOR SYS GMBH18 citations79
US7292328B2Nov 6, 2007
Method for inspection of a wafer
VISTEC SEMICONDUCTOR SYS GMBH8 citations72
US7307713B2Dec 11, 2007
Apparatus and method for inspection of a wafer
VISTEC SEMICONDUCTOR SYS GMBH3 citations62
US7477370B2Jan 13, 2009
Method of detecting incomplete edge bead removal from a disk-like object
VISTEC SEMICONDUCTOR SYS GMBH6 citations59