Inventor
TAN CHUAN SENG
US11 patents
⚠️ This page may combine multiple inventors who share the name “TAN CHUAN SENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV NANYANG TECH
6 patentsUS10950689B2Mar 16, 2021
Semiconductor device with a through-substrate via hole having therein a capacitor and a through-substrate via conductor
UNIV NANYANG TECH5 citations71
US11581451B2Feb 14, 2023
Method of facilitating straining of a semiconductor element for semiconductor fabrication, semiconductor platform obtained by the method, and optoelectronic device comprising the semiconductor platform
UNIV NANYANG TECH0 citations48
US10483351B2Nov 19, 2019
Method of manufacturing a substrate with reduced threading dislocation density
UNIV NANYANG TECH0 citations48
US10598853B2Mar 24, 2020
Optical structure and method of forming the same
UNIV NANYANG TECH0 citations46
US10510560B2Dec 17, 2019
Method of encapsulating a substrate
UNIV NANYANG TECH0 citations37
US10418273B2Sep 17, 2019
Method of manufacturing a germanium-on-insulator substrate
UNIV NANYANG TECH0 citations37
MASSACHUSETTS INST TECHNOLOGY
5 patentsUS7307003B2Dec 11, 2007
Method of forming a multi-layer semiconductor structure incorporating a processing handle member
MASSACHUSETTS INST TECHNOLOGY101 citations95
US10049947B2Aug 14, 2018
Method of manufacturing a substrate
MASSACHUSETTS INST TECHNOLOGY5 citations70
US10049916B2Aug 14, 2018
Method of manufacturing a germanium-on-insulator substrate
MASSACHUSETTS INST TECHNOLOGY2 citations64
US10672608B2Jun 2, 2020
Fabrication of a device on a carrier substrate
MASSACHUSETTS INST TECHNOLOGY0 citations50
US11901186B2Feb 13, 2024
Method of reducing semiconductor substrate surface unevenness
MASSACHUSETTS INST TECHNOLOGY0 citations47