Inventor
Zhuang da-ming
CN9 patents
Patents
9 patentsUS9530640B2Dec 27, 2016
Oxide semiconductor film
UNIV TSINGHUA4 citations70
US9732415B2Aug 15, 2017
Sputtering target, oxide semiconducting film, and method for making the same
UNIV TSINGHUA3 citations69
US9840769B2Dec 12, 2017
Sputtering target, oxide semiconducting film, and method for making the same
UNIV TSINGHUA3 citations67
US9945022B2Apr 17, 2018
Method for making oxide semiconductor film
UNIV TSINGHUA0 citations49
US9748367B2Aug 29, 2017
Method for making thim film transistor
UNIV TSINGHUA0 citations49
US9570627B2Feb 14, 2017
Thim film transistor and method for making the same, thim film transistor panel and display device
UNIV TSINGHUA1 citations49
US10480061B2Nov 19, 2019
Sputtering target
UNIV TSINGHUA0 citations48
US10077496B2Sep 18, 2018
Sputtering target and method for making the same
UNIV TSINGHUA0 citations48
US9828667B2Nov 28, 2017
Method for making tin oxide thin film
UNIV TSINGHUA1 citations47