Inventor

SASAGAWA NORIHIKO

JP5 patents

⚠️ This page may combine multiple inventors who share the name “SASAGAWA NORIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents

US10168618B2Jan 1, 2019

Liquid processing method and storage medium

TOKYO ELECTRON LTD5 citations71

US10074548B2Sep 11, 2018

Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium

TOKYO ELECTRON LTD2 citations71

US10755952B2Aug 25, 2020

Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium

TOKYO ELECTRON LTD1 citations61

US7326299B2Feb 5, 2008

Process liquid supply nozzle, process liquid supply device and nozzle cleaning method

TOKYO ELECTRON LTD4 citations59

SASAGAWA NORIHIKO

1 patent

US9195138B2Nov 24, 2015

Liquid processing apparatus, liquid processing method and storage medium

SASAGAWA NORIHIKO7 citations78