Inventor
HAMADA MASAHITO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “HAMADA MASAHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS6312171B1Nov 6, 2001
Developing apparatus and method thereof
TOKYO ELECTRON LTD16 citations83
US7927657B2Apr 19, 2011
Liquid processing apparatus and liquid processing method
TOKYO ELECTRON LTD12 citations82
US7615117B2Nov 10, 2009
Coating and processing apparatus and method
TOKYO ELECTRON LTD10 citations82
US7566365B2Jul 28, 2009
Liquid processing apparatus and liquid processing method
TOKYO ELECTRON LTD15 citations82
US8016976B2Sep 13, 2011
Film removing device and film removing method
TOKYO ELECTRON LTD11 citations79
US7553374B2Jun 30, 2009
Coating treatment apparatus and coating treatment method
TOKYO ELECTRON LTD7 citations72
US10074548B2Sep 11, 2018
Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium
TOKYO ELECTRON LTD2 citations71
US10755952B2Aug 25, 2020
Chemical liquid discharge mechanism, liquid processing apparatus, chemical liquid discharge method, and storage medium
TOKYO ELECTRON LTD1 citations61
US7819594B2Oct 26, 2010
Development processing device
TOKYO ELECTRON LTD4 citations60
US8343284B2Jan 1, 2013
Film removing device and film removing method
TOKYO ELECTRON LTD0 citations47