Inventor
PETTERSON MAUREEN
US7 patents
⚠️ This page may combine multiple inventors who share the name “PETTERSON MAUREEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
3 patentsUS10665433B2May 26, 2020
Extreme edge uniformity control
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3 citations72
US11574800B2Feb 7, 2023
Extreme edge uniformity control
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations62
US11053580B2Jul 6, 2021
Techniques for selective deposition using angled ions
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations59
PETTERSON MAUREEN
3 patentsUS11324973B2May 10, 2022
Multi-color charged particle detector apparatus and method of use thereof
PETTERSON MAUREEN2 citations69
US10532228B2Jan 14, 2020
Multi-color charged particle detector apparatus and method of use thereof
PETTERSON MAUREEN3 citations69
US10898732B2Jan 26, 2021
Multi-color charged particle detector apparatus and method of use thereof
PETTERSON MAUREEN1 citations59