Inventor

ADRIAENS JOHANNES MATHIAS THEODORUS ANTONIUS

NL4 patents

⚠️ This page may combine multiple inventors who share the name “ADRIAENS JOHANNES MATHIAS THEODORUS ANTONIUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US9470988B2Oct 18, 2016

Substrate positioning system, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV10 citations78

US11619886B2Apr 4, 2023

Position measurement system, interferometer system and lithographic apparatus

ASML NETHERLANDS BV0 citations47

US11940264B2Mar 26, 2024

Mirror calibrating method, a position measuring method, a lithographic apparatus and a device manufacturing method

ASML NETHERLANDS BV0 citations41

SCHOORMANS CAROLUS JOHANNES CATHARINA

1 patent

US8330941B2Dec 11, 2012

Calibration method for a lithographic apparatus

SCHOORMANS CAROLUS JOHANNES CATHARINA0 citations40