Inventor
NAKAMICHI TOMOHIRO
JP5 patents
Patents
5 patentsUS11842880B2Dec 12, 2023
Estimation model generation method and electron microscope
JEOL LTD0 citations56
US11764029B2Sep 19, 2023
Method of measuring aberration and electron microscope
JEOL LTD0 citations56
US12255041B2Mar 18, 2025
Electron microscope and method of correcting aberration
JEOL LTD0 citations53
US11222764B2Jan 11, 2022
Charged particle beam device and control method of optical system of charged particle beam device
JEOL LTD0 citations44
US10720302B2Jul 21, 2020
Electron microscope
JEOL LTD0 citations38