Inventor
DILLEN HERMANUS ADRIANUS
NL12 patents
Patents
12 patentsUS10754256B2Aug 25, 2020
Method and apparatus for pattern correction and verification
ASML NETHERLANDS BV2 citations66
US12124179B2Oct 22, 2024
Method of wafer alignment using at resolution metrology on product features
ASML NETHERLANDS BV0 citations61
US12315175B2May 27, 2025
Method in the manufacturing process of a device, a non-transitory computer-readable medium and a system configured to perform the method
ASML NETHERLANDS BV0 citations59
US11860548B2Jan 2, 2024
Method for characterizing a manufacturing process of semiconductor devices
ASML NETHERLANDS BV1 citations59
US11972922B2Apr 30, 2024
Method for calibrating a scanning charged particle microscope
ASML NETHERLANDS BV0 citations58
US11668661B2Jun 6, 2023
Inspection tool and inspection method
ASML NETHERLANDS BV0 citations58
US11646174B2May 9, 2023
Method for calibrating a scanning charged particle microscope
ASML NETHERLANDS BV1 citations58
US12386268B2Aug 12, 2025
Method for calibrating simulation process based on defect-based process window
ASML NETHERLANDS BV0 citations57
US11796920B2Oct 24, 2023
Method for controlling a manufacturing process and associated apparatuses
ASML NETHERLANDS BV0 citations56
US11733614B2Aug 22, 2023
Method of metrology and associated apparatuses
ASML NETHERLANDS BV0 citations56
US11112703B2Sep 7, 2021
Method of metrology and associated apparatuses
ASML NETHERLANDS BV0 citations56
US12566385B2Mar 3, 2026
Method for determining a field-of-view setting
ASML NETHERLANDS BV0 citations55