Inventor
KOSHIMAKI TOSHIRO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “KOSHIMAKI TOSHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
5 patentsUS11094572B2Aug 17, 2021
Substrate processing apparatus and recording medium
KOKUSAI ELECTRIC CORP4 citations70
US12476129B2Nov 18, 2025
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP0 citations61
US12320778B2Jun 3, 2025
Method of processing substrate, substrate processing apparatus, method of manufacturing semiconductor processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations61
US11869790B2Jan 9, 2024
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
KOKUSAI ELECTRIC CORP0 citations61
US11841343B2Dec 12, 2023
Method of processing substrate, substrate processing apparatus, method of manufacturing semiconductor processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP1 citations61
HITACHI INT ELECTRIC INC
3 patentsUS10289781B2May 14, 2019
Management apparatus, substrate processing system and non-transitory computer-readable recording medium
HITACHI INT ELECTRIC INC2 citations69
US8719230B2May 6, 2014
Information managing method, information searching method and data displaying method
HITACHI INT ELECTRIC INC0 citations50
US7895207B2Feb 22, 2011
Substrate processing system and data retrieval method
HITACHI INT ELECTRIC INC0 citations49