Inventor
SHIN YANG SIK
KR16 patents
Patents
16 patentsUS9620395B2Apr 11, 2017
Apparatus for processing substrate for supplying reaction gas having phase difference
EUGENE TECHNOLOGY CO LTD9 citations83
US9593415B2Mar 14, 2017
Substrate processing apparatus including auxiliary gas supply port
EUGENE TECHNOLOGY CO LTD7 citations83
US9875895B2Jan 23, 2018
Substrate processing apparatus including exhaust ports and substrate processing method
EUGENE TECHNOLOGY CO LTD5 citations72
US9869019B2Jan 16, 2018
Substrate processing apparatus including processing unit
EUGENE TECHNOLOGY CO LTD3 citations72
US9368380B2Jun 14, 2016
Substrate processing device with connection space
EUGENE TECHNOLOGY CO LTD4 citations72
US10337103B2Jul 2, 2019
Substrate processing apparatus
EUGENE TECHNOLOGY CO LTD5 citations71
US10229845B2Mar 12, 2019
Substrate treatment apparatus
EUGENE TECHNOLOGY CO LTD4 citations71
US10161036B2Dec 25, 2018
Substrate processing apparatus
EUGENE TECHNOLOGY CO LTD4 citations71
US9758870B2Sep 12, 2017
Substrate treatment apparatus, and method for controlling temperature of heater
EUGENE TECHNOLOGY CO LTD3 citations71
US10593545B2Mar 17, 2020
Method for substrate processing using exhaust ports
EUGENE TECHNOLOGY CO LTD0 citations51
US9953850B2Apr 24, 2018
Substrate processing apparatus including heat-shield plate
EUGENE TECHNOLOGY CO LTD1 citations51
US9593418B2Mar 14, 2017
Showerhead having cooling system and substrate processing apparatus including the showerhead
EUGENE TECHNOLOGY CO LTD1 citations51
US12243767B2Mar 4, 2025
Substrate support assembly and substrate processing apparatus
EUGENE TECHNOLOGY CO LTD0 citations47
US12488963B2Dec 2, 2025
Substrate processing apparatus
EUGENE TECHNOLOGY CO LTD0 citations46
US10793949B2Oct 6, 2020
Substrate processing apparatus and substrate processing method using the same
EUGENE TECHNOLOGY CO LTD0 citations40
US9644895B2May 9, 2017
Heater moving type substrate processing apparatus
EUGENE TECHNOLOGY CO LTD0 citations40