Inventor

CHOW YU C

US4 patents

⚠️ This page may combine multiple inventors who share the name “CHOW YU C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUGHES AIRCRAFT CO

2 patents

US4847111AJul 11, 1989

Plasma-nitridated self-aligned tungsten system for VLSI interconnections

HUGHES AIRCRAFT CO88 citations95

US4920403AApr 24, 1990

Selective tungsten interconnection for yield enhancement

HUGHES AIRCRAFT CO31 citations91

SPECTRUM CVD INC

1 patent

US4737474AApr 12, 1988

Silicide to silicon bonding process

SPECTRUM CVD INC28 citations91

LIAO KUAN Y

1 patent

US4961822AOct 9, 1990

Fully recessed interconnection scheme with titanium-tungsten and selective CVD tungsten

LIAO KUAN Y27 citations87