Inventor
NOGUCHI SADAHISA
JP5 patents
Patents
5 patentsUS5776557AJul 7, 1998
Method for forming a film on a substrate by activating a reactive gas
TOSHIBA KK110 citations98
US5385763AJan 31, 1995
Method for forming a film on a substrate by activating a reactive gas
TOSHIBA KK264 citations98
US5156881AOct 20, 1992
Method for forming a film on a substrate by activating a reactive gas
TOSHIBA KK376 citations98
US5591486AJan 7, 1997
Method for forming a film on a substrate by activating a reactive gas
TOSHIBA KK25 citations92
US5458919AOct 17, 1995
Method for forming a film on a substrate by activating a reactive gas
TOSHIBA KK12 citations81