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Inventor
ACEVEDO MARCO A
US
3 patents
Patents
3 patents
US6358130B1
Mar 19, 2002
Polishing pad
RODEL INC
125 citations
95
US6620036B2
Sep 16, 2003
Stacked polishing pad having sealed edge
RODEL INC
23 citations
88
US6464576B1
Oct 15, 2002
Stacked polishing pad having sealed edge
RODEL INC
17 citations
88