Inventor

KOZUKI TAKAAKI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KOZUKI TAKAAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SONY CORP

1 patent

US6280292B1Aug 28, 2001

Polishing apparatus

SONY CORP25 citations91

(unassigned)

1 patent

US6428389B2Aug 6, 2002

Polishing apparatus

21 citations90

NAKAMURA HIROKO

1 patent

US8980748B2Mar 17, 2015

Substrate polishing method, semiconductor device and fabrication method therefor

NAKAMURA HIROKO0 citations39