Inventor
VAN NGUYEN SON
US5 patents
⚠️ This page may combine multiple inventors who share the name “VAN NGUYEN SON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS5330935AJul 19, 1994
Low temperature plasma oxidation process
IBM151 citations98
US7479306B2Jan 20, 2009
SiCOH dielectric material with improved toughness and improved Si-C bonding, semiconductor device containing the same, and method to make the same
IBM26 citations92
US5643640AJul 1, 1997
Fluorine doped plasma enhanced phospho-silicate glass, and process
IBM20 citations88
US5672537ASep 30, 1997
Method for preparing a narrow angle defined trench in a substrate
IBM12 citations73