Inventor
BRANKNER KEITH J
US3 patents
Patents
3 patentsUS5458732AOct 17, 1995
Method and system for identifying process conditions
TEXAS INSTRUMENTS INC72 citations92
US6573194B2Jun 3, 2003
Method of growing surface aluminum nitride on aluminum films with low energy barrier
TEXAS INSTRUMENTS INC3 citations60
US5928964AJul 27, 1999
System and method for anisotropic etching of silicon nitride
TEXAS INSTRUMENTS INC4 citations57