Inventor
COBB ERIC R
US12 patents
⚠️ This page may combine multiple inventors who share the name “COBB ERIC R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
8 patentsUS7888662B2Feb 15, 2011
Ion source cleaning method and apparatus
VARIAN SEMICONDUCTOR EQUIPMENT9 citations83
US7655932B2Feb 2, 2010
Techniques for providing ion source feed materials
VARIAN SEMICONDUCTOR EQUIPMENT10 citations83
US7491947B2Feb 17, 2009
Technique for improving performance and extending lifetime of indirectly heated cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT11 citations83
US7102139B2Sep 5, 2006
Source arc chamber for ion implanter having repeller electrode mounted to external insulator
VARIAN SEMICONDUCTOR EQUIPMENT14 citations83
US9093372B2Jul 28, 2015
Technique for processing a substrate
VARIAN SEMICONDUCTOR EQUIPMENT6 citations82
US9064795B2Jun 23, 2015
Technique for processing a substrate
VARIAN SEMICONDUCTOR EQUIPMENT8 citations82
US6984831B2Jan 10, 2006
Gas flow restricting cathode system for ion implanter and related method
VARIAN SEMICONDUCTOR EQUIPMENT2 citations60
US7887034B2Feb 15, 2011
Indirectly heated cathode clamp system and method
VARIAN SEMICONDUCTOR EQUIPMENT2 citations58