Inventor
FUTO WATARU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “FUTO WATARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
7 patentsUS6174796B1Jan 16, 2001
Semiconductor device manufacturing method
FUJITSU LTD103 citations97
US6936510B2Aug 30, 2005
Semiconductor device with self-aligned contact and its manufacture
FUJITSU LTD12 citations92
US6285045B1Sep 4, 2001
Semiconductor device with self-aligned contact and its manufacture
FUJITSU LTD31 citations92
US6440844B1Aug 27, 2002
Semiconductor device with copper wiring and its manufacture method
FUJITSU LTD27 citations90
US6130482AOct 10, 2000
Semiconductor device and method for fabricating the same
FUJITSU LTD48 citations90
US6620674B1Sep 16, 2003
Semiconductor device with self-aligned contact and its manufacture
FUJITSU LTD4 citations73
US7151025B2Dec 19, 2006
Method of manufacturing a semiconductor device with self-aligned contacts
FUJITSU LTD0 citations52