Inventor
TRINTCHOUK FEDOR B
US5 patents
⚠️ This page may combine multiple inventors who share the name “TRINTCHOUK FEDOR B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
4 patentsUS7741639B2Jun 22, 2010
Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control
CYMER INC12 citations82
US7471708B2Dec 30, 2008
Gas discharge laser output light beam parameter control
CYMER INC6 citations61
US7852889B2Dec 14, 2010
Active spectral control of DUV light source
CYMER INC3 citations60
US7643522B2Jan 5, 2010
Method and apparatus for gas discharge laser bandwidth and center wavelength control
CYMER INC2 citations60