P

Inventor

SABHARWAL AMITABH

US10 patents
⚠️ This page may combine multiple inventors who share the name “SABHARWAL AMITABH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

7 patents
US7909961B2Mar 22, 2011

Method and apparatus for photomask plasma etching

APPLIED MATERIALS INC21 citations92
US9978632B2May 22, 2018

Direct lift process apparatus

APPLIED MATERIALS INC8 citations83
US7943005B2May 17, 2011

Method and apparatus for photomask plasma etching

APPLIED MATERIALS INC15 citations83
US7964818B2Jun 21, 2011

Method and apparatus for photomask etching

APPLIED MATERIALS INC3 citations61
US9754765B2Sep 5, 2017

Electrodes for etch

APPLIED MATERIALS INC0 citations51
US10199224B2Feb 5, 2019

Method for improving CD micro-loading in photomask plasma etching

APPLIED MATERIALS INC0 citations49
US9425062B2Aug 23, 2016

Method for improving CD micro-loading in photomask plasma etching

APPLIED MATERIALS INC0 citations49

SINGH SARAVJEET

1 patent
US10170277B2Jan 1, 2019

Apparatus and methods for dry etch with edge, side and back protection

SINGH SARAVJEET4 citations70

KUMAR AJAY

1 patent
US8568553B2Oct 29, 2013

Method and apparatus for photomask plasma etching

KUMAR AJAY0 citations51

YU KEVEN

1 patent
US8778574B2Jul 15, 2014

Method for etching EUV material layers utilized to form a photomask

YU KEVEN0 citations41