Inventor
OUYE ALAN HIROSHI
US11 patents
⚠️ This page may combine multiple inventors who share the name “OUYE ALAN HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS7909961B2Mar 22, 2011
Method and apparatus for photomask plasma etching
APPLIED MATERIALS INC21 citations92
US7943005B2May 17, 2011
Method and apparatus for photomask plasma etching
APPLIED MATERIALS INC15 citations83
US9165812B2Oct 20, 2015
Cooled tape frame lift and low contact shadow ring for plasma heat isolation
APPLIED MATERIALS INC6 citations82
US9293304B2Mar 22, 2016
Plasma thermal shield for heat dissipation in plasma chamber
APPLIED MATERIALS INC2 citations61
US6406553B1Jun 18, 2002
Method to reduce contaminants from semiconductor wafers
APPLIED MATERIALS INC5 citations61
US11195756B2Dec 7, 2021
Proximity contact cover ring for plasma dicing
APPLIED MATERIALS INC0 citations52
US6598316B2Jul 29, 2003
Apparatus to reduce contaminants from semiconductor wafers
APPLIED MATERIALS INC0 citations50