Inventor

TSAI KUO-CHIANG

TW34 patents

Patents

34 patents

US11069784B2Jul 20, 2021

Integrated circuit devices having raised via contacts and methods of fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73

US12040225B2Jul 16, 2024

Insulating cap on contact structure

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72

US11139203B2Oct 5, 2021

Using mask layers to facilitate the formation of self-aligned contacts and vias

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72

US11728216B2Aug 15, 2023

Semiconductor device with reduced contact resistance and methods of forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69

US11239114B2Feb 1, 2022

Semiconductor device with reduced contact resistance and methods of forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69

US11626495B2Apr 11, 2023

Protective liner for source/drain contact to prevent electrical bridging while minimizing resistance

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68

US12243826B2Mar 4, 2025

Method for manufacturing semiconductor structure having raised via contacts

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12154957B2Nov 26, 2024

Semiconductor devices and methods of manufacture

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12148797B2Nov 19, 2024

Gate air spacer protection during source/drain via hole etching

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12074218B2Aug 27, 2024

Contact structure with insulating cap

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12046646B2Jul 23, 2024

Contact and via structures

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11955380B2Apr 9, 2024

Conductive element for semiconductor devices

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11545432B2Jan 3, 2023

Semiconductor device with source and drain vias having different sizes

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US11508616B2Nov 22, 2022

Electrical connection for semiconductor devices

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US10950729B2Mar 16, 2021

Contact structure with insulating cap

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62

US12588237B2Mar 24, 2026

Method for forming via structure with low resistivity

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61

US11837663B2Dec 5, 2023

Via structure with low resistivity and method for forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61

US11393717B2Jul 19, 2022

Insulating cap on contact structure and method for forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61

US11081585B2Aug 3, 2021

Via structure with low resistivity and method for forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61

US11018057B2May 25, 2021

Semiconductor devices

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61

US10658237B2May 19, 2020

Semiconductor devices

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61

US12317570B2May 27, 2025

Protective liner for source/drain contact to prevent electrical bridging while minimizing resistance

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58

US12255096B2Mar 18, 2025

Semiconductor device with reduced contact resistance and methods of forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58

US11222821B2Jan 11, 2022

Semiconductor device with reduced via bridging risk

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58

US10665506B2May 26, 2020

Semiconductor device with reduced via bridging risk

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58

US12471352B2Nov 11, 2025

Semiconductor device and method of fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57

US12154856B2Nov 26, 2024

Methods of manufacturing via structures on source/drain contacts

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52

US10693004B2Jun 23, 2020

Via structure with low resistivity and method for forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51

US10879400B2Dec 29, 2020

Field effect transistor and method of manufacturing the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41

TSAI KUO-CHIANG

Patents

Semiconductor device and method of manufacture

Insulating cap on contact structure and method for forming the same

Gate air spacer protection during source/drain via hole etching

Methods of fabricating integrated circuit devices having raised via contacts

Electrical connection for semiconductor devices

Integrated circuit devices having raised via contacts and methods of fabricating the same

Insulating cap on contact structure

Using mask layers to facilitate the formation of self-aligned contacts and vias

Semiconductor device with reduced contact resistance and methods of forming the same

Semiconductor device with reduced contact resistance and methods of forming the same

Protective liner for source/drain contact to prevent electrical bridging while minimizing resistance

Method for manufacturing semiconductor structure having raised via contacts

Semiconductor devices and methods of manufacture

Gate air spacer protection during source/drain via hole etching

Contact structure with insulating cap

Contact and via structures

Conductive element for semiconductor devices

Semiconductor device with source and drain vias having different sizes

Electrical connection for semiconductor devices

Contact structure with insulating cap

Method for forming via structure with low resistivity

Via structure with low resistivity and method for forming the same

Insulating cap on contact structure and method for forming the same

Via structure with low resistivity and method for forming the same

Semiconductor devices

Semiconductor devices

Protective liner for source/drain contact to prevent electrical bridging while minimizing resistance

Semiconductor device with reduced contact resistance and methods of forming the same

Semiconductor device with reduced via bridging risk

Semiconductor device with reduced via bridging risk

Semiconductor device and method of fabricating the same

Methods of manufacturing via structures on source/drain contacts

Via structure with low resistivity and method for forming the same

Field effect transistor and method of manufacturing the same