Inventor
CHEN JYH-HUEI
TW53 patents
⚠️ This page may combine multiple inventors who share the name “CHEN JYH-HUEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
37 patentsUS10153351B2Dec 11, 2018
Semiconductor device and a method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD14 citations92
US11069784B2Jul 20, 2021
Semiconductor device and method of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10825721B2Nov 3, 2020
Insulating cap on contact structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations83
US10109507B2Oct 23, 2018
Fluorine contamination control in semiconductor manufacturing process
TAIWAN SEMICONDUCTOR MFG CO LTD13 citations83
US11784218B2Oct 10, 2023
Gate air spacer protection during source/drain via hole etching
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11424188B2Aug 23, 2022
Methods of fabricating integrated circuit devices having raised via contacts
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10950497B2Mar 16, 2021
Electrical connection for semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10840189B2Nov 17, 2020
Integrated circuit devices having raised via contacts and methods of fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10714586B2Jul 14, 2020
Semiconductor device and a method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US9449971B2Sep 20, 2016
Methods of forming FinFETs
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US12040225B2Jul 16, 2024
Insulating cap on contact structure
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US11139203B2Oct 5, 2021
Using mask layers to facilitate the formation of self-aligned contacts and vias
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10868184B2Dec 15, 2020
Fin field effect transistor (FinFET) device structure with hard mask layer over gate structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11626495B2Apr 11, 2023
Protective liner for source/drain contact to prevent electrical bridging while minimizing resistance
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US12243826B2Mar 4, 2025
Method for manufacturing semiconductor structure having raised via contacts
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12154957B2Nov 26, 2024
Semiconductor devices and methods of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12148797B2Nov 19, 2024
Gate air spacer protection during source/drain via hole etching
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12074218B2Aug 27, 2024
Contact structure with insulating cap
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12046646B2Jul 23, 2024
Contact and via structures
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11955380B2Apr 9, 2024
Conductive element for semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11569362B2Jan 31, 2023
Semiconductor device and a method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11545432B2Jan 3, 2023
Semiconductor device with source and drain vias having different sizes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11508616B2Nov 22, 2022
Electrical connection for semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11011636B2May 18, 2021
Fin field effect transistor (FinFET) device structure with hard mask layer over gate structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10950729B2Mar 16, 2021
Contact structure with insulating cap
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12588237B2Mar 24, 2026
Method for forming via structure with low resistivity
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11837663B2Dec 5, 2023
Via structure with low resistivity and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11393717B2Jul 19, 2022
Insulating cap on contact structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11081585B2Aug 3, 2021
Via structure with low resistivity and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11018057B2May 25, 2021
Semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US10658237B2May 19, 2020
Semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations61
US12317570B2May 27, 2025
Protective liner for source/drain contact to prevent electrical bridging while minimizing resistance
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12477807B2Nov 18, 2025
Semiconductor device and a method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12154856B2Nov 26, 2024
Methods of manufacturing via structures on source/drain contacts
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10693004B2Jun 23, 2020
Via structure with low resistivity and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10262878B2Apr 16, 2019
Fluorine contamination control in semiconductor manufacturing process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9941372B2Apr 10, 2018
Semiconductor device having electrode and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
TAIWAN SEMICONDUCTOR MFG
7 patentsUS6444566B1Sep 3, 2002
Method of making borderless contact having a sion buffer layer
TAIWAN SEMICONDUCTOR MFG22 citations93
US8658483B2Feb 25, 2014
Method of fabricating an integrated circuit device having backside bevel protection
TAIWAN SEMICONDUCTOR MFG6 citations80
US6630398B2Oct 7, 2003
Borderless contact with buffer layer
TAIWAN SEMICONDUCTOR MFG3 citations63
US7785949B2Aug 31, 2010
Method for forming semiconductor device using multi-functional sacrificial dielectric layer
TAIWAN SEMICONDUCTOR MFG1 citations52
US8835242B2Sep 16, 2014
Semiconductor structure and method
TAIWAN SEMICONDUCTOR MFG1 citations51
US7678655B2Mar 16, 2010
Spacer layer etch method providing enhanced microelectronic device performance
TAIWAN SEMICONDUCTOR MFG1 citations51
US9337293B2May 10, 2016
Semiconductor device having electrode and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG0 citations50
KO CHUN-HUNG
3 patentsHUANG CHUN-HUNG
2 patentsHSU JUNG-TZU
1 patentShowing the top 50 of 53 patents by PatentIndex Score.