Inventor

RATH MELISSA K

US7 patents

⚠️ This page may combine multiple inventors who share the name “RATH MELISSA K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RATH MELISSA K

3 patents

US8058219B2Nov 15, 2011

Metals compatible post-etch photoresist remover and/or sacrificial antireflective coating etchant

RATH MELISSA K25 citations91

US8951948B2Feb 10, 2015

Metal and dielectric compatible sacrificial anti-reflective coating cleaning and removal composition

RATH MELISSA K21 citations90

US8338087B2Dec 25, 2012

Composition and process for post-etch removal of photoresist and/or sacrificial anti-reflective material deposited on a substrate

RATH MELISSA K19 citations82

ADVANCED TECH MATERIALS

2 patents

US9256134B2Feb 9, 2016

Photoresist removal

ADVANCED TECH MATERIALS5 citations83

US7994108B2Aug 9, 2011

Composition useful for removal of post-etch photoresist and bottom anti-reflection coatings

ADVANCED TECH MATERIALS11 citations83

MINSEK DAVID W

1 patent

US8679734B2Mar 25, 2014

Photoresist removal

MINSEK DAVID W3 citations61

ENTEGRIS INC

1 patent

US9422513B2Aug 23, 2016

Metal and dielectric compatible sacrificial anti-reflective coating cleaning and removal composition

ENTEGRIS INC0 citations51