Inventor
BERNHARD DAVID D
US10 patents
⚠️ This page may combine multiple inventors who share the name “BERNHARD DAVID D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED TECH MATERIALS
5 patentsUS6692546B2Feb 17, 2004
Chemical mechanical polishing compositions for metal and associated materials and method of using same
ADVANCED TECH MATERIALS70 citations94
US7029373B2Apr 18, 2006
Chemical mechanical polishing compositions for metal and associated materials and method of using same
ADVANCED TECH MATERIALS47 citations91
US7888301B2Feb 15, 2011
Resist, barc and gap fill material stripping chemical and method
ADVANCED TECH MATERIALS22 citations89
US9256134B2Feb 9, 2016
Photoresist removal
ADVANCED TECH MATERIALS5 citations83
US7994108B2Aug 9, 2011
Composition useful for removal of post-etch photoresist and bottom anti-reflection coatings
ADVANCED TECH MATERIALS11 citations83
RATH MELISSA K
3 patentsUS8058219B2Nov 15, 2011
Metals compatible post-etch photoresist remover and/or sacrificial antireflective coating etchant
RATH MELISSA K25 citations91
US8951948B2Feb 10, 2015
Metal and dielectric compatible sacrificial anti-reflective coating cleaning and removal composition
RATH MELISSA K21 citations90
US8338087B2Dec 25, 2012
Composition and process for post-etch removal of photoresist and/or sacrificial anti-reflective material deposited on a substrate
RATH MELISSA K19 citations82