Inventor
TANG YU-PO
TW20 patents
⚠️ This page may combine multiple inventors who share the name “TANG YU-PO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
6 patentsUS9716032B2Jul 25, 2017
Via-free interconnect structure with self-aligned metal line interconnections
TAIWAN SEMICONDUCTOR MFG CO LTD48 citations98
US11048161B2Jun 29, 2021
Optical proximity correction methodology using pattern classification for target placement
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10866397B2Dec 15, 2020
Microscope apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11619806B2Apr 4, 2023
Microscope apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10527928B2Jan 7, 2020
Optical proximity correction methodology using pattern classification for target placement
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10295813B2May 21, 2019
Microscope apparatus and method for phase image acquisition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
TAIWAN SEMICONDUCTOR MFG
6 patentsUS9390217B2Jul 12, 2016
Methodology of optical proximity correction optimization
TAIWAN SEMICONDUCTOR MFG68 citations97
US8381153B2Feb 19, 2013
Dissection splitting with optical proximity correction and mask rule check enforcement
TAIWAN SEMICONDUCTOR MFG21 citations91
US9165095B2Oct 20, 2015
Target point generation for optical proximity correction
TAIWAN SEMICONDUCTOR MFG4 citations72
US9189588B2Nov 17, 2015
Polygon-based optical proximity correction
TAIWAN SEMICONDUCTOR MFG3 citations62
US9026957B2May 5, 2015
Method of defining an intensity selective exposure photomask
TAIWAN SEMICONDUCTOR MFG1 citations62
US8806392B2Aug 12, 2014
Distinguishable IC patterns with encoded information
TAIWAN SEMICONDUCTOR MFG2 citations62