Inventor
WERBER ARMIN
DE13 patents
⚠️ This page may combine multiple inventors who share the name “WERBER ARMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
5 patentsUS9996012B2Jun 12, 2018
Facet mirror for use in a projection exposure apparatus for microlithography
ZEISS CARL SMT GMBH2 citations72
US9523922B2Dec 20, 2016
Illumination system of a microlithographic projection exposure apparatus having a temperature control device
ZEISS CARL SMT GMBH3 citations71
US9274434B2Mar 1, 2016
Light modulator and illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH2 citations61
US9535336B2Jan 3, 2017
Microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations51
US9513562B2Dec 6, 2016
Projection exposure apparatus for microlithography for the production of semiconductor components
ZEISS CARL SMT GMBH0 citations50
WERBER ARMIN
2 patentsUS9013676B2Apr 21, 2015
Individual mirror for constructing a faceted mirror, in particular for use in a projection exposure system for microlithography
WERBER ARMIN2 citations57
US9025128B2May 5, 2015
Actuator including magnet for a projection exposure system and projection exposure system including a magnet
WERBER ARMIN0 citations45