Inventor
CUIJPERS MARTINUS AGNES WILLEM
NL15 patents
⚠️ This page may combine multiple inventors who share the name “CUIJPERS MARTINUS AGNES WILLEM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS6473161B2Oct 29, 2002
Lithographic projection apparatus, supporting assembly and device manufacturing method
ASML NETHERLANDS BV33 citations91
US7193722B2Mar 20, 2007
Lithographic apparatus with disturbance correction system and device manufacturing method
ASML NETHERLANDS BV12 citations82
US10747127B2Aug 18, 2020
Lithographic apparatus
ASML NETHERLANDS BV5 citations68
US7456527B2Nov 25, 2008
Moveable object carrier, lithographic apparatus comprising the moveable object carrier and device manufacturing method
ASML NETHERLANDS BV2 citations61
US7755742B2Jul 13, 2010
Lithographic apparatus with mounted sensor
ASML NETHERLANDS BV2 citations57
US7148950B2Dec 12, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations57
US7030967B2Apr 18, 2006
Lithographic apparatus, device manufacturing method and substrate holder
ASML NETHERLANDS BV1 citations47
US9575416B2Feb 21, 2017
Lithographic apparatus, device manufacturing method and displacement measurement system
ASML NETHERLANDS BV0 citations40