Inventor
JACOBS FRANSISCUS MATHIJS
NL7 patents
⚠️ This page may combine multiple inventors who share the name “JACOBS FRANSISCUS MATHIJS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
5 patentsUS10191393B2Jan 29, 2019
Lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV3 citations71
US8368868B2Feb 5, 2013
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless
ASML NETHERLANDS BV2 citations62
US10816910B2Oct 27, 2020
Vibration isolator, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations47
US9575416B2Feb 21, 2017
Lithographic apparatus, device manufacturing method and displacement measurement system
ASML NETHERLANDS BV0 citations40
US10503086B2Dec 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations37