Inventor
KOENEN WILLEM HERMAN GERTRUDA ANNA
NL12 patents
⚠️ This page may combine multiple inventors who share the name “KOENEN WILLEM HERMAN GERTRUDA ANNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS7889314B2Feb 15, 2011
Calibration methods, lithographic apparatus and patterning device for such lithographic apparatus
ASML NETHERLANDS BV8 citations82
US9470988B2Oct 18, 2016
Substrate positioning system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations78
US11774865B2Oct 3, 2023
Method of controlling a position of a first object relative to a second object, control unit, lithographic apparatus and apparatus
ASML NETHERLANDS BV0 citations58
US7557903B2Jul 7, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations57
US7756597B2Jul 13, 2010
Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program
ASML NETHERLANDS BV4 citations54
US9575416B2Feb 21, 2017
Lithographic apparatus, device manufacturing method and displacement measurement system
ASML NETHERLANDS BV0 citations40
US9651877B2May 16, 2017
Position measurement system, grating for a position measurement system and method
ASML NETHERLANDS BV0 citations39
KOENEN WILLEM HERMAN GERTRUDA ANNA
2 patentsUS8922756B2Dec 30, 2014
Position measurement system, lithographic apparatus and device manufacturing method
KOENEN WILLEM HERMAN GERTRUDA ANNA2 citations59
US8451454B2May 28, 2013
Stage system, lithographic apparatus including such stage system, and correction method
KOENEN WILLEM HERMAN GERTRUDA ANNA3 citations59