Inventor
LIPPY STEVEN
US12 patents
⚠️ This page may combine multiple inventors who share the name “LIPPY STEVEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
8 patentsUS10138117B2Nov 27, 2018
Aqueous formulations for removing metal hard mask and post-etch residue with Cu/W compatibility
ENTEGRIS INC10 citations83
US11978622B2May 7, 2024
Aqueous and semi-aqueous cleaners for the removal of post-etch residues with tungsten and cobalt compatibility
ENTEGRIS INC2 citations71
US10472567B2Nov 12, 2019
Compositions and methods for selectively etching titanium nitride
ENTEGRIS INC4 citations71
US10460954B2Oct 29, 2019
Anti-reflective coating cleaning and post-etch residue removal composition having metal, dielectric and nitride compatibility
ENTEGRIS INC2 citations71
US10428271B2Oct 1, 2019
Compositions and methods for selectively etching titanium nitride
ENTEGRIS INC3 citations71
US10392560B2Aug 27, 2019
Compositions and methods for selectively etching titanium nitride
ENTEGRIS INC4 citations71
US11346008B2May 31, 2022
Ruthenium etching composition and method
ENTEGRIS INC0 citations62
US11476158B2Oct 18, 2022
Cobalt deposition selectivity on copper and dielectrics
ENTEGRIS INC1 citations57