P

Inventor

YOKOYAMA TOSHIO

JP63 patents
⚠️ This page may combine multiple inventors who share the name “YOKOYAMA TOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

19 patents
US7087117B2Aug 8, 2006

Substrate processing apparatus and substrate processing method

EBARA CORP23 citations92
US7575636B2Aug 18, 2009

Substrate processing apparatus and substrate processing method

EBARA CORP8 citations84
US7442257B2Oct 28, 2008

Substrate processing apparatus and substrate processing method

EBARA CORP9 citations84
US7368016B2May 6, 2008

Substrate processing unit and substrate processing apparatus

EBARA CORP15 citations84
US6824613B2Nov 30, 2004

Substrate processing apparatus

EBARA CORP16 citations82
US7585205B2Sep 8, 2009

Substrate polishing apparatus and method

EBARA CORP7 citations73
US9673067B2Jun 6, 2017

Substrate processing apparatus and processed substrate manufacturing method

EBARA CORP3 citations72
US7341634B2Mar 11, 2008

Apparatus for and method of processing substrate

EBARA CORP4 citations62
US11098414B2Aug 24, 2021

Plating system, a plating system control method, and a storage medium containing a program for causing a computer to execute the plating system control method

EBARA CORP0 citations61
US11024520B2Jun 1, 2021

Substrate processing apparatus

EBARA CORP0 citations61
US11015261B2May 25, 2021

Substrate holder and plating apparatus

EBARA CORP0 citations61
US11434580B2Sep 6, 2022

Plating apparatus

EBARA CORP0 citations60
US12020954B2Jun 25, 2024

Substrate processing apparatus

EBARA CORP0 citations59
US11781233B2Oct 10, 2023

Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank

EBARA CORP0 citations58
US11767606B2Sep 26, 2023

Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank

EBARA CORP0 citations58
US11230780B2Jan 25, 2022

Copper oxide solid for use in plating of a substrate, method of producing the copper oxide solid, and apparatus for supplying a plating solution into a plating tank

EBARA CORP0 citations58
US10654017B2May 19, 2020

Supply-liquid producing apparatus and supply-liquid producing method

EBARA CORP1 citations58
US7976362B2Jul 12, 2011

Substrate polishing apparatus and method

EBARA CORP1 citations52
US7735450B2Jun 15, 2010

Substrate holding apparatus

EBARA CORP0 citations52

HONDA MOTOR CO LTD

12 patents

KOMATSU MFG CO LTD

9 patents

KONISHIROKU PHOTO IND

3 patents

NISHIDA KIMIO

1 patent

KABUSHIKI RAISHA KOTOBUKI

1 patent

SS PHARMACEUTICAL CO

1 patent

MITSUBISHI MOTORS CORP

1 patent

SSP CO LTD

1 patent

KATSUOKA SEIJI

1 patent

YOKOYAMA TOSHIO

1 patent

Showing the top 50 of 63 patents by PatentIndex Score.