Inventor

ISHIBASHI KEN

JP5 patents

Patents

5 patents

US12248251B2Mar 11, 2025

Silicon-containing resist underlayer film-forming composition including organic group having ammonium group

NISSAN CHEMICAL CORP0 citations58

US11966164B2Apr 23, 2024

Semiconductor device production method employing silicon-containing resist underlayer film-forming composition including organic group having ammonium group

NISSAN CHEMICAL CORP0 citations58

US12585188B2Mar 24, 2026

Composition for forming resist underlying film

NISSAN CHEMICAL CORP0 citations49

US12372875B2Jul 29, 2025

Composition for resist pattern metallization process

NISSAN CHEMICAL CORP0 citations49

US12227621B2Feb 18, 2025

Film-forming composition

NISSAN CHEMICAL CORP0 citations48