Inventor
UNO MEGUMI
JP3 patents
Patents
3 patentsUS12251738B2Mar 18, 2025
Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing tool
EBARA CORP0 citations57
US12358028B2Jul 15, 2025
Cleaning apparatus for cleaning member, cleaning method for cleaning member, and substrate cleaning method
EBARA CORP0 citations46
US12101073B2Sep 24, 2024
Method for determining a cleanliness of a cleaning member
EBARA CORP0 citations44