Inventor
TAKATOH CHIKAKO
JP4 patents
Patents
4 patentsUS9242339B2Jan 26, 2016
Polishing apparatus and polishing method
EBARA CORP4 citations67
US12251738B2Mar 18, 2025
Method and apparatus for cleaning washing tool, substrate washing device, and method for manufacturing washing tool
EBARA CORP0 citations57
US12358028B2Jul 15, 2025
Cleaning apparatus for cleaning member, cleaning method for cleaning member, and substrate cleaning method
EBARA CORP0 citations46
US12101073B2Sep 24, 2024
Method for determining a cleanliness of a cleaning member
EBARA CORP0 citations44