Inventor
JENSEN ELMER W
US4 patents
Patents
4 patentsUS5578362ANov 26, 1996
Polymeric polishing pad containing hollow polymeric microelements
RODEL INC433 citations97
US5264010ANov 23, 1993
Compositions and methods for polishing and planarizing surfaces
RODEL INC172 citations97
US4927432AMay 22, 1990
Pad material for grinding, lapping and polishing
RODEL INC231 citations97
US5487697AJan 30, 1996
Polishing apparatus and method using a rotary work holder travelling down a rail for polishing a workpiece with linear pads
RODEL INC64 citations94