Inventor
HOLDEN SCOTT C
US17 patents
⚠️ This page may combine multiple inventors who share the name “HOLDEN SCOTT C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN ASSOCIATES
8 patentsUS4457359AJul 3, 1984
Apparatus for gas-assisted, solid-to-solid thermal transfer with a semiconductor wafer
VARIAN ASSOCIATES159 citations98
US4542298ASep 17, 1985
Methods and apparatus for gas-assisted thermal transfer with a semiconductor wafer
VARIAN ASSOCIATES80 citations96
US4535835AAug 20, 1985
Optimum surface contour for conductive heat transfer with a thin flexible workpiece
VARIAN ASSOCIATES53 citations96
US4508161AApr 2, 1985
Method for gas-assisted, solid-to-solid thermal transfer with a semiconductor wafer
VARIAN ASSOCIATES104 citations96
US4537244AAug 27, 1985
Method for optimum conductive heat transfer with a thin flexible workpiece
VARIAN ASSOCIATES27 citations92
US4458746AJul 10, 1984
Optimum surface contour for conductive heat transfer with a thin flexible workpiece
VARIAN ASSOCIATES37 citations91
US4504194AMar 12, 1985
Air lock vacuum pumping methods and apparatus
VARIAN ASSOCIATES22 citations82
US4475045AOct 2, 1984
Rapid pumpdown for high vacuum processing
VARIAN ASSOCIATES7 citations74
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
3 patentsUS9859098B2Jan 2, 2018
Temperature controlled ion source
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC5 citations81
US9673076B2Jun 6, 2017
System and method for rotational transfer of articles between vacuum and non-vacuum environments
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations59
US10262833B2Apr 16, 2019
Temperature controlled ion source
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations49