Inventor
WILSON SYD R
US16 patents
Patents
16 patentsUS5424245AJun 13, 1995
Method of forming vias through two-sided substrate
MOTOROLA INC318 citations98
US4755865AJul 5, 1988
Means for stabilizing polycrystalline semiconductor layers
MOTOROLA INC208 citations97
US4682407AJul 28, 1987
Means and method for stabilizing polycrystalline semiconductor layers
MOTOROLA INC60 citations94
US4943539AJul 24, 1990
Process for making a multilayer metallization structure
MOTOROLA INC70 citations93
US4683637AAug 4, 1987
Forming depthwise isolation by selective oxygen/nitrogen deep implant and reaction annealing
MOTOROLA INC92 citations92
US4740481AApr 26, 1988
Method of preventing hillock formation in polysilicon layer by oxygen implanation
MOTOROLA INC34 citations91
US5112772AMay 12, 1992
Method of fabricating a trench structure
MOTOROLA INC38 citations89
US5217920AJun 8, 1993
Method of forming substrate contact trenches and isolation trenches using anodization for isolation
MOTOROLA INC50 citations88
US4621413ANov 11, 1986
Fabricating a semiconductor device with reduced gate leakage
MOTOROLA INC25 citations79
US5933750AAug 3, 1999
Method of fabricating a semiconductor device with a thinned substrate
MOTOROLA INC14 citations73
US4717588AJan 5, 1988
Metal redistribution by rapid thermal processing
MOTOROLA INC12 citations73
US5554889ASep 10, 1996
Structure and method for metallization of semiconductor devices
MOTOROLA INC11 citations70
US4799392AJan 24, 1989
Method for determining silicon (mass 28) beam purity prior to implantation of gallium arsenide
MOTOROLA INC18 citations69
US4732866AMar 22, 1988
Method for producing low noise, high grade constant semiconductor junctions
MOTOROLA INC13 citations65
US6180495B1Jan 30, 2001
Silicon carbide transistor and method therefor
MOTOROLA INC3 citations62
US5700721ADec 23, 1997
Structure and method for metallization of semiconductor devices
MOTOROLA INC2 citations58