Inventor
BARBEE STEVEN GEORGE
US16 patents
Patents
16 patentsUS6072313AJun 6, 2000
In-situ monitoring and control of conductive films by detecting changes in induced eddy currents
IBM163 citations98
US5731697AMar 24, 1998
In-situ monitoring of the change in thickness of films
IBM108 citations98
US5660672AAug 26, 1997
In-situ monitoring of conductive films on semiconductor wafers
IBM155 citations98
US5644221AJul 1, 1997
Endpoint detection for chemical mechanical polishing using frequency or amplitude mode
IBM135 citations98
US5659492AAug 19, 1997
Chemical mechanical polishing endpoint process control
IBM60 citations96
US5788801AAug 4, 1998
Real time measurement of etch rate during a chemical etching process
IBM49 citations91
US5728222AMar 17, 1998
Apparatus for chemical vapor deposition of aluminum oxide
IBM33 citations90
US5648113AJul 15, 1997
Aluminum oxide LPCVD system
IBM25 citations90
US5770948AJun 23, 1998
Rotary signal coupling for chemical mechanical polishing endpoint detection with a strasbaugh tool
IBM36 citations88
US5663637ASep 2, 1997
Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool
IBM41 citations87
US11562400B1Jan 24, 2023
Uplift modeling
IBM3 citations73
US11443235B2Sep 13, 2022
Identifying optimal weights to improve prediction accuracy in machine learning techniques
IBM2 citations73
US7953689B2May 31, 2011
Combined feature creation to increase data mining signal in hybrid datasets
IBM2 citations62
US6291351B1Sep 18, 2001
Endpoint detection in chemical-mechanical polishing of cloisonne structures
IBM6 citations59
US12555031B2Feb 17, 2026
Feature generation for training data sets based on unlabeled data
IBM0 citations52
US12093838B2Sep 17, 2024
Efficient execution of a decision tree
IBM0 citations52