Inventor

ZHONG QING HUA

SG2 patents

Patents

2 patents

US5801083ASep 1, 1998

Use of polymer spacers for the fabrication of shallow trench isolation regions with rounded top corners

CHARTERED SEMICONDUCTOR MFG251 citations97

US6140206AOct 31, 2000

Method to form shallow trench isolation structures

CHARTERED SEMICONDUCTOR MFG17 citations82