Inventor
YE JIAN HUI
SG6 patents
⚠️ This page may combine multiple inventors who share the name “YE JIAN HUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
5 patentsUS5801083ASep 1, 1998
Use of polymer spacers for the fabrication of shallow trench isolation regions with rounded top corners
CHARTERED SEMICONDUCTOR MFG251 citations97
US6009888AJan 4, 2000
Photoresist and polymer removal by UV laser aqueous oxidant
CHARTERED SEMICONDUCTOR MFG62 citations94
US7902066B2Mar 8, 2011
Damascene contact structure for integrated circuits
CHARTERED SEMICONDUCTOR MFG9 citations83
US6057240AMay 2, 2000
Aqueous surfactant solution method for stripping metal plasma etch deposited oxidized metal impregnated polymer residue layers from patterned metal layers
CHARTERED SEMICONDUCTOR MFG18 citations82
US6004722ADec 21, 1999
Hydrolytically stable organic polymer material for organic polymer anti-reflective (ARC) layer
CHARTERED SEMICONDUCTOR MFG9 citations68