Inventor
KUTSUZAWA JUNJI
JP5 patents
Patents
5 patentsUS5688411ANov 18, 1997
Method of and apparatus for removing coating from edge of substrate
TOKYO OHKA KOGYO CO LTD63 citations93
US5972426AOct 26, 1999
Method of coating substrate with coating nozzle
TOKYO OHKA KOGYO CO LTD31 citations92
US5769946AJun 23, 1998
Coating nozzle and coating device having coating nozzle
TOKYO OHKA KOGYO CO LTD27 citations92
US6423139B1Jul 23, 2002
Chemical liquid treatment apparatus
TOKYO OHKA KOGYO CO LTD5 citations61
US6090216AJul 18, 2000
Cleaning device and cleaning method for applicator nozzle
TOKYO OHKA KOGYO CO LTD6 citations60