Inventor
KARCHER WOLFRAM
DE7 patents
Patents
7 patentsUS6699747B2Mar 2, 2004
Method for increasing the capacitance in a storage trench
INFINEON TECHNOLOGIES AG117 citations94
US6781180B1Aug 24, 2004
Trench capacitor and method for fabricating the same
INFINEON TECHNOLOGIES AG21 citations87
US6664167B2Dec 16, 2003
Memory with trench capacitor and selection transistor and method for fabricating it
INFINEON TECHNOLOGIES AG9 citations72
US6326262B1Dec 4, 2001
Method for fabricating epitaxy layer
INFINEON TECHNOLOGIES AG8 citations72
US7049647B2May 23, 2006
Semiconductor memory cell with trench capacitor and selection transistor and method for fabricating it
INFINEON TECHNOLOGIES AG5 citations62
US6194314B1Feb 27, 2001
Process for chemical vapor deposition layer production on a semiconductor surface with absorbing protective gasses
INFINEON TECHNOLOGIES AG2 citations57
US10060023B2Aug 28, 2018
Backing plate for a sputter target, sputter target, and sputter device
INFINEON TECHNOLOGIES AG0 citations34