Inventor
ZHU WENXIAN
US9 patents
⚠️ This page may combine multiple inventors who share the name “ZHU WENXIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
6 patentsUS7211525B1May 1, 2007
Hydrogen treatment enhanced gap fill
NOVELLUS SYSTEMS INC540 citations96
US7078312B1Jul 18, 2006
Method for controlling etch process repeatability
NOVELLUS SYSTEMS INC163 citations96
US7163896B1Jan 16, 2007
Biased H2 etch process in deposition-etch-deposition gap fill
NOVELLUS SYSTEMS INC58 citations93
US7344996B1Mar 18, 2008
Helium-based etch process in deposition-etch-deposition gap fill
NOVELLUS SYSTEMS INC22 citations92
US6844612B1Jan 18, 2005
Low dielectric constant fluorine-doped silica glass film for use in integrated circuit chips and method of forming the same
NOVELLUS SYSTEMS INC24 citations89
US7476621B1Jan 13, 2009
Halogen-free noble gas assisted H2 plasma etch process in deposition-etch-deposition gap fill
NOVELLUS SYSTEMS INC15 citations84