Inventor

STONE STANLEY W

US5 patents

⚠️ This page may combine multiple inventors who share the name “STONE STANLEY W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

2 patents

US7214027B2May 8, 2007

Wafer handler method and system

VARIAN SEMICONDUCTOR EQUIPMENT8 citations68

US7236853B2Jun 26, 2007

Automated robot alignment system and method using kinematic pins and end effector sensor

VARIAN SEMICONDUCTOR EQUIPMENT0 citations49

AXCELIS TECH INC

1 patent

US10573541B2Feb 25, 2020

System for semiconductor wafer retention and sensing in a vacuum load lock

AXCELIS TECH INC3 citations68

LEE WILLIAM D

1 patent

US9236216B2Jan 12, 2016

In-vacuum high speed pre-chill and post-heat stations

LEE WILLIAM D3 citations68

OTA KAN

1 patent

US9611540B2Apr 4, 2017

Electrostatic chuck shielding mechanism

OTA KAN0 citations37