Inventor
GRANNEMAN ERNST HENDRIK AUGUST
NL17 patents
⚠️ This page may combine multiple inventors who share the name “GRANNEMAN ERNST HENDRIK AUGUST”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INT
11 patentsUS7312156B2Dec 25, 2007
Method and apparatus for supporting a semiconductor wafer during processing
ASM INT294 citations99
US6613685B1Sep 2, 2003
Method for supporting a semiconductor wafer during processing
ASM INT379 citations99
US6461439B1Oct 8, 2002
Apparatus for supporting a semiconductor wafer during processing
ASM INT371 citations99
US6183565B1Feb 6, 2001
Method and apparatus for supporting a semiconductor wafer during processing
ASM INT502 citations99
US6607602B1Aug 19, 2003
Device for processing semiconductor wafers
ASM INT349 citations98
US6805749B2Oct 19, 2004
Method and apparatus for supporting a semiconductor wafer during processing
ASM INT38 citations96
US6240875B1Jun 5, 2001
Vertical oven with a boat for the uniform treatment of wafers
ASM INT348 citations94
US6877250B2Apr 12, 2005
Apparatus, method and system for the treatment of a wafer
ASM INT21 citations92
US7048488B1May 23, 2006
Apparatus for transferring wafer and ring
ASM INT51 citations91
US6770851B2Aug 3, 2004
Method and apparatus for the treatment of substrates
ASM INT37 citations91
US6560896B2May 13, 2003
Apparatus, method and system for the treatment of a wafer
ASM INT9 citations73
ASM INT NV
3 patentsUS10738382B2Aug 11, 2020
Substrate processing apparatus
ASM INT NV3 citations66
US11339474B2May 24, 2022
Atomic layer deposition apparatus and method for processing substrates using an apparatus
ASM INT NV0 citations60
US10648078B2May 12, 2020
Atomic layer deposition apparatus and method for processing substrates using an apparatus
ASM INT NV1 citations60