Inventor

SOUDA KAZUAKI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “SOUDA KAZUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMCO CORP

1 patent

US7731801B2Jun 8, 2010

Semiconductor wafer treatment method and apparatus therefor

SUMCO CORP6 citations57

SUMITOMO MITSUBISHI SILICON

1 patent

US7678200B2Mar 16, 2010

Technique on ozone water for use in cleaning semiconductor substrate

SUMITOMO MITSUBISHI SILICON0 citations46