Inventor

CARDONE FRANK

US3 patents

Patents

3 patents

US7906413B2Mar 15, 2011

Abrupt “delta-like” doping in Si and SiGe films by UHV-CVD

IBM137 citations97

US6723621B1Apr 20, 2004

Abrupt delta-like doping in Si and SiGe films by UHV-CVD

IBM45 citations95

US7067855B2Jun 27, 2006

Semiconductor structure having an abrupt doping profile

IBM10 citations72